Structural disorder and distribution of impurity atoms in β-Ga2O3 under boron ion implantation
Alena Nikolskaya, Д. С. Королев, В. Н. Трушин, M.N. Drozdov, P. A. Yunin, Е. А. Питиримова, А. В. Кудрин, E.V. Okulich, V.I. Okulich, Alexey Mikhaylov, D. I. Tetelbaum
2023Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms11 citationsDOI
Topics & Concepts
BoronIon implantationImpurityDopingMaterials scienceAnnealing (glass)GalliumIonRedistribution (election)DiffractionSiliconElectron diffractionSemiconductorAnalytical Chemistry (journal)ChemistryOptoelectronicsMetallurgyOpticsChromatographyPoliticsPolitical scienceLawPhysicsOrganic chemistryGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques