Structural and mechanical characterization of sputtered CuxNi100-x thin film using molecular dynamics
Anh-Vu Pham, Te‐Hua Fang, Anh-Son Tran, Tao‐Hsing Chen
Topics & Concepts
NanoindentationMaterials scienceIndentationAlloySubstrate (aquarium)Composite materialMolecular dynamicsDislocationMetallurgyCrystallographyChemistryGeologyOceanographyComputational chemistryMetal and Thin Film MechanicsCopper Interconnects and ReliabilityMicrostructure and mechanical properties