Low-loss optofluidic waveguides in fused silica enabled by spatially shaped femtosecond laser assisted etching combined with carbon dioxide laser irradiation
Jianping Yu, Jian Xu, Qiaonan Dong, Jia Qi, Jianfang Chen, Aodong Zhang, Yunpeng Song, Wei Chen, Ya Cheng
Topics & Concepts
FemtosecondMaterials scienceCarbon dioxide laserIrradiationLaserEtching (microfabrication)Silicon dioxideOpticsOptoelectronicsSilica glassCarbon dioxideNanotechnologyChemistryComposite materialLayer (electronics)Organic chemistryNuclear physicsPhysicsLaser surgeryPhotonic and Optical DevicesLaser Material Processing TechniquesAdvanced Fiber Laser Technologies