Impact of Al2O3 spacers on the improvement in short-channel effects for the mesa-shaped vertical-channel In-Ga-Zn-O thin-film transistors with a channel length below 100 nm
Chae-Eun Oh, Young-Ha Kwon, Nak‐Jin Seong, Kyu-Jeong Choi, Sung‐Min Yoon
Topics & Concepts
Materials scienceSubthreshold swingAtomic layer depositionOptoelectronicsEtching (microfabrication)WaferDopingTransistorNanotechnologyAnalytical Chemistry (journal)Threshold voltageLayer (electronics)VoltageElectrical engineeringChemistryEngineeringChromatographyThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices