Reliability of RF MEMS switches at cryogenic (liquid He) temperatures
Robert R. Benoit, N. Scott Barker
Topics & Concepts
StictionMicroelectromechanical systemsReliability (semiconductor)WaveformRepeatabilityMaterials scienceCryogenic temperatureMean time between failuresFailure mechanismReplicaElectrical engineeringOptoelectronicsEngineeringVoltageReliability engineeringFailure rateComposite materialChemistryPhysicsThermodynamicsPower (physics)Visual artsChromatographyArtAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdhesion, Friction, and Surface Interactions