Deposition of diamond films on Si by microwave plasma CVD in varied CH4-H2 mixtures: Reverse nanocrystalline-to-microcrystalline structure transition at very high methane concentrations
Vadim Sedov, Artem Martyanov, А.А. Khomich, Sergey Savin, E.V. Zavedeev, Victor Ralchenko
Topics & Concepts
MicrocrystallineChemical vapor depositionDiamondRaman spectroscopyNanocrystalline materialMaterials scienceMethaneAnalytical Chemistry (journal)Scanning electron microscopePlasma-enhanced chemical vapor depositionCarbon filmDeposition (geology)Thin filmMineralogyChemical engineeringChemistryNanotechnologyMetallurgyComposite materialCrystallographyOpticsSedimentEngineeringPhysicsPaleontologyOrganic chemistryChromatographyBiologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsHigh-pressure geophysics and materials