Novel full-scale model verified by atomic surface and developed composite microfiber and slurry polishing system
Feng Zhao, Zhenyu Zhang, Hongxiu Zhou, Junyuan Feng, Xingqiao Deng, Zhensong Liu, Fanning Meng, Chunjing Shi
Topics & Concepts
PolishingMaterials scienceSlurryComposite numberComposite materialMicrofiberChemical-mechanical planarizationLayer (electronics)Advanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdhesion, Friction, and Surface Interactions