An extended Stoney's formula including nonlinear deformation for large size wafer of multilayers with arbitrary thicknesses
Mengda Li, Jiejun Wu, Jinmi He, Nanliu Liu, Tong Han, Guoyi Zhang, Tongjun Yu
Topics & Concepts
WaferMaterials scienceCurvatureNonlinear systemDeformation (meteorology)BendingFabricationPhotonicsOpticsOptoelectronicsGeometryPhysicsComposite materialMathematicsQuantum mechanicsPathologyAlternative medicineMedicineAdvanced MEMS and NEMS TechnologiesAdvanced Materials and MechanicsMetal and Thin Film Mechanics