Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning
Thomas Mortelmans, Dimitrios Kazazis, Vitaliy A. Guzenko, Celestino Padeste, Thomas Braun, Henning Stahlberg, Xiaodan Li, Yasin Ekinci
Topics & Concepts
ResistElectron-beam lithographyGrayscaleMaterials scienceLithographyStructuringCathode rayFabricationOpticsNanotechnologyOptoelectronicsElectronPhysicsPixelQuantum mechanicsMedicineAlternative medicineLayer (electronics)PathologyFinanceEconomicsAdvancements in Photolithography TechniquesNanofabrication and Lithography TechniquesAdvanced Surface Polishing Techniques