Effect of nitrogen/argon ratios on structures and properties of high-entropy (ZrTiNbV)N nitride films by multi-arc ion plating
Dengyi Yan, Wenju Xu, Jingfeng Li, Li Ji, Xiaohong Liu, Lei Shi, Chufeng Sun, Hongxuan Li
Abstract
The multi-arc ion plating technique has been used to prepare high-entropy (ZrTiNbV)N ceramic films. Meanwhile, the effects of different nitrogen/argon ratios of R N on film microstructures, mechanical properties, tribological properties and corrosion resistance are systematically investigated. The high-entropy (ZrTiNbV)N ceramic films with face-centered cubic structure are fabricated when the R N exceeded the critical value of R N = 1. Additionally, the films form dense structures and bond tightly to the substrate under all R N conditions. Compared with other films, the films deposited at R N = 3 have the best mechanical and tribological properties. The hardness up to 31.70 ± 1.67 GPa, and the wear rate is as low as (3.39 ± 0.18) × 10 −6 mm 3 /N −1 m −1 . Moreover, the corrosion current density in 3.5 wt% NaCl solution is only 1.119 × 10 −7 A/cm 2 , showing excellent corrosion resistance.