Atomic surface of fused silica and polishing mechanism interpreted by molecular dynamics and density functional theory
Lu Liu, Zhao Zhang, Chao Shi, Hao Zhou, Dong Liu, Yan Li, Guangyong Xu, J. Feng, Fanning Meng
Topics & Concepts
PolishingChemical-mechanical planarizationDensity functional theoryMaterials scienceSlurryMolecular dynamicsSurface roughnessNanotechnologyMechanism (biology)Chemical engineeringComposite materialChemistryComputational chemistryEngineeringPhilosophyEpistemologyElectronic and Structural Properties of OxidesAdvanced Surface Polishing TechniquesAnalytical Chemistry and Sensors