Modeling and analysis of MEMS capacitive pressure sensors with vertical comb fingers
Zhenyu Liu, Yusi Zhu, Lidong Du, Zhan Zhao, Zhen Fang
Topics & Concepts
Capacitive sensingFinite element methodSensitivity (control systems)Microelectromechanical systemsLinearityPressure sensorNonlinear systemElectronic engineeringPressure measurementAcousticsMaterials scienceEngineeringMechanical engineeringElectrical engineeringStructural engineeringOptoelectronicsPhysicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesAdvanced Sensor and Energy Harvesting MaterialsAdvanced Fiber Optic Sensors