Performance enhancement of MOCVD grown Zn-doped β-Ga2O3 Deep-Ultraviolet photodetectors on silicon substrates via TiN buffer layers
Anoop Kumar Singh, Jun-Hong Shen, Shi‐Ming Huang, Chao-Chun Yen, Hsin-Yu Chou, Wen‐Jen Chiang, Bharath Kumar Yadlapalli, Chiung‐Yi Huang, Po-Liu Liang, Ray‐Hua Horng, Dong‐Sing Wuu
Topics & Concepts
Metalorganic vapour phase epitaxyTinPhotodetectorDopingUltravioletMaterials scienceBuffer (optical fiber)OptoelectronicsSiliconLayer (electronics)NanotechnologyEpitaxyMetallurgyTelecommunicationsComputer scienceGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques