In-situ crystallization of rutile-phased TiO2 via the template effect using MoO2 electrode for the metal-insulator-metal capacitor applications
Chaeyeong Hwang, Ye Won Kim, Jongwook Park, Myeong Ho Kim, Jinsik Kim, Woojin Jeon
Topics & Concepts
CapacitorMaterials scienceRutileDielectricAtomic layer depositionCrystallizationSemiconductorElectrodeNanotechnologyOptoelectronicsHigh-κ dielectricInsulator (electricity)Thin filmChemical engineeringElectrical engineeringVoltageChemistryEngineeringPhysical chemistrySemiconductor materials and devicesAdvanced Memory and Neural ComputingFerroelectric and Negative Capacitance Devices