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In-situ crystallization of rutile-phased TiO2 via the template effect using MoO2 electrode for the metal-insulator-metal capacitor applications

Chaeyeong Hwang, Ye Won Kim, Jongwook Park, Myeong Ho Kim, Jinsik Kim, Woojin Jeon

2024Journal of Alloys and Compounds9 citationsDOI

Topics & Concepts

CapacitorMaterials scienceRutileDielectricAtomic layer depositionCrystallizationSemiconductorElectrodeNanotechnologyOptoelectronicsHigh-κ dielectricInsulator (electricity)Thin filmChemical engineeringElectrical engineeringVoltageChemistryEngineeringPhysical chemistrySemiconductor materials and devicesAdvanced Memory and Neural ComputingFerroelectric and Negative Capacitance Devices
In-situ crystallization of rutile-phased TiO2 via the template effect using MoO2 electrode for the metal-insulator-metal capacitor applications | Litcius