Kinetic study of grain growth in highly (111)-preferred nanotwinned copper films
Chih-Han Tseng, I-Hsin Tseng, Yu-Pei Huang, Yun-Ting Hsu, Jihperng Leu, K. N. Tu, Chih Chen
Topics & Concepts
Materials scienceNucleationMicrostructureGrain growthElectron backscatter diffractionAnnealing (glass)Abnormal grain growthGrain sizeCopperCrystallographyElectron diffractionDiffractionMetallurgyComposite materialOpticsThermodynamicsChemistryPhysicsMicrostructure and mechanical propertiesCopper Interconnects and ReliabilityMetal and Thin Film Mechanics