Structural and mechanical properties of amorphous Si–C-based thin films deposited by pulsed magnetron sputtering under different sputtering powers
Long Qian, Linqing Wang, Weijie Yu, Weijiu Huang, Li Wang, Li Wang, Li Wang
Topics & Concepts
SputteringMaterials scienceAmorphous solidSputter depositionThin filmComposite materialHigh-power impulse magnetron sputteringOptoelectronicsNanotechnologyChemistryCrystallographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced ceramic materials synthesis