Environmental stability and ageing of ScN thin films from XPS Ar+ depth profiling
Stanislav Cichoň, Joris More-Chevalier, U. D. Wdowik, Esther de Prado, J. Bulı́ř, Michal Novotný, Ladislav Fekete, Jan Duchoň, Dominik Legut, J. Lančok
Topics & Concepts
X-ray photoelectron spectroscopyAgeingProfiling (computer programming)Thin filmMaterials scienceChemical engineeringAnalytical Chemistry (journal)ChemistryEnvironmental chemistryNanotechnologyComputer scienceEngineeringBiologyOperating systemGeneticsMetal and Thin Film MechanicsSemiconductor materials and devicesAdvanced ceramic materials synthesis