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Annealing induced phase transition and optical properties of Ga2O3 thin films synthesized by sputtering technique

Yijin Meng, Yuqi Gao, Keyu Chen, Jixue Lu, Fenglin Xian, Linhua Xu, Gaige Zheng, Wenjian Kuang, Zhaolou Cao

2021Optik34 citationsDOI

Topics & Concepts

Materials scienceAnnealing (glass)Thin filmSapphireSputteringBand gapSputter depositionAnalytical Chemistry (journal)OptoelectronicsOpticsNanotechnologyComposite materialLaserPhysicsChemistryChromatographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques
Annealing induced phase transition and optical properties of Ga2O3 thin films synthesized by sputtering technique | Litcius