Traceable and long-range grating pitch measurement with picometer resolution
Yongfang Xie, Wei Jia, Dong Zhao, Zong-Hao Ye, Peng Sun, Changcheng Xiang, Jin Wang, Changhe Zhou
Topics & Concepts
GratingOpticsRepeatabilityInterferometryMaterials scienceLaserBlazed gratingDiffraction gratingInterference (communication)PhysicsTelecommunicationsChromatographyComputer scienceChannel (broadcasting)ChemistryAdvanced Measurement and Metrology TechniquesOptical Coatings and GratingsPhotonic and Optical Devices