Improvement in Sensing Characteristics of Silicon Microstructure based MEMS Capacitive Sensor for Automotive Applications
Shreya Suman, Deepak Punetha, Saurabh Kumar Pandey
Topics & Concepts
Materials scienceCapacitive sensingMicroelectromechanical systemsCapacitancePressure sensorDiaphragm (acoustics)Automotive industryRobustness (evolution)OptoelectronicsAutomotive engineeringComposite materialMechanical engineeringAcousticsElectrical engineeringEngineeringLoudspeakerPhysicsElectrodePhysical chemistryChemistryBiochemistryAerospace engineeringGeneGas Sensing Nanomaterials and SensorsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator Technologies