LevCube: A six-degree-of-freedom magnetically levitated nanopositioning stage with centimeter-range XYZ motion
Ian L. Heyman, Jingjie Wu, Lei Zhou
Topics & Concepts
Computer scienceMachiningMotion controlAccelerationPlanarPrecision engineeringMechanical engineeringEngineeringPhysicsAcousticsElectrical engineeringArtificial intelligenceMiniaturizationRobotClassical mechanicsComputer graphics (images)Advanced Surface Polishing TechniquesPiezoelectric Actuators and ControlAdvanced Measurement and Metrology Techniques