Atomic layer deposition – state-of-the-art approach to nanoscale hetero-interfacial engineering of chemical sensors electrodes: A review
Hongyan Xu, Mohammad Karbalaei Akbari, Surender Kumar, Francis Verpoort, Serge Zhuiykov
Topics & Concepts
Atomic layer depositionNanotechnologyMaterials scienceNanomaterialsNanoscopic scaleFabricationResponsivitySemiconductorDeposition (geology)Layer (electronics)OptoelectronicsPhotodetectorPathologyBiologySedimentMedicineAlternative medicinePaleontologyElectronic and Structural Properties of OxidesGas Sensing Nanomaterials and SensorsAnalytical Chemistry and Sensors