MoS<sub>2</sub> Chemiresistive Sensor Array on Paper Patterned with Toner Lithography for Simultaneous Detection of NH<sub>3</sub> and H<sub>2</sub>S Gases
Srinivasulu Kanaparthi, Shiv Govind Singh
Abstract
We report a green lithography process to pattern a MoS2 gas sensor array on paper. First, the toner sacrificial layer is printed on photo paper using a laser printer, followed by the deposition of a sensing layer with direct writing of the MoS2 pellet. Finally, the toner is lifted off in acetone to obtain the sensor array. The sensors in the array biased at different voltages exhibit a linear response to NH3 and H2S gases at room temperature. The concentrations of individual gases in their binary mixture are extracted from the response of the two sensors in the array using graphical analysis. The absolute error in predicting the concentration of NH3 and H2S in their binary mixture is less than 15%, which is practically acceptable for most gas sensing applications. The proposed method for making gas sensors involves neither rigorous use of toxic or carcinogenic solvents nor nonrenewable resources. Moreover, the reported process is scalable and can produce many devices in a short time. As a green and sustainable method to create efficient multigas sensing devices using solid-state deposition of MoS2, the method paves a way to develop future disposable gas sensing technology.