Influence of W contents on the microstructure and tribological properties of W-DLC coatings deposited by PECVD combined with magnetron sputtering
Xingguo Feng, Shengzhu Cao, Yugang Zheng, Ying He, Keliang Wang, Kaifeng Zhang, Hui Zhou
Topics & Concepts
MicrostructurePlasma-enhanced chemical vapor depositionMaterials scienceSputter depositionTribologyMetallurgyCavity magnetronSputteringChemical engineeringThin filmNanotechnologySiliconEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites