Laser-assisted grinding of silicon nitride ceramics: Micro-groove preparation and removal mechanism
Chongjun Wu, Tangyong Zhang, Weicheng Guo, Xiankai Meng, Zishan Ding, Steven Y. Liang
Topics & Concepts
GrindingMaterials scienceGroove (engineering)CeramicSurface roughnessSilicon nitrideLaserSurface integrityComposite materialSiliconMetallurgyOpticsPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques