Radiation Damage and Nanofabrication in TEM and STEM
R.F. Egerton
Abstract
Different aspects of electron-beam damage are summarized, together with some quantitative evaluation. TEM and STEM are compared in terms of information-to-damage ratio. Electron-beam fabrication is briefly considered in terms of resolution and writing speed.
Topics & Concepts
NanolithographyRadiation damageMaterials scienceNanotechnologyRadiationPhysicsMedicineOpticsPathologyFabricationAlternative medicineIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography TechniquesAdvanced Surface Polishing Techniques