Study of β-Ga2O3 films hetero-epitaxially grown on off-angled sapphire substrates by halide vapor phase epitaxy
Wanli Xu, Jiacheng Shi, Yuewen Li, Xiangqian Xiu, Shan Ding, Zili Xie, Tao Tao, Peng Chen, Bin Liu, Rong Zhang, Youdou Zheng
Topics & Concepts
EpitaxySapphireMaterials scienceCrystal (programming language)Scanning electron microscopeSubstrate (aquarium)HillockCrystallographyDiffractionHalideOptoelectronicsOpticsNanotechnologyComposite materialChemistryInorganic chemistryLayer (electronics)LaserOceanographyComputer scienceProgramming languagePhysicsGeologyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques