Quasi-vertical ε-Ga2O3 solar-blind photodetectors grown on p-Si substrates with Al2O3 buffer layer by metalorganic chemical vapor deposition
Hong Liang Qian, Xiaodong Zhang, Yongjian Ma, Li Zhang, Tiwei Chen, Xing Wei, Wenbo Tang, Xin Zhou, Boyuan Feng, Yaming Fan, Yuanping Sun, Baoshun Zhang
Topics & Concepts
Chemical vapor depositionMetalorganic vapour phase epitaxyHeterojunctionResponsivityMaterials scienceLayer (electronics)OptoelectronicsUltravioletCrystallinityPhotodetectorDark currentBuffer (optical fiber)Thin filmNanotechnologyEpitaxyComputer scienceTelecommunicationsComposite materialGa2O3 and related materialsAdvanced Photocatalysis TechniquesZnO doping and properties