High temperature protection performance of sandwich structure Al2O3/Si3N4/YAlO multilayer films for Pt–Pt10%Rh thin film thermocouples
Yang Liu, Hongchuan Jiang, Xiaohui Zhao, Baorui Liu, Zhouxia Jia, Xinwu Deng, Wanli Zhang
Topics & Concepts
Materials scienceMicrostructureThermoelectric effectThin filmSputter depositionAnnealing (glass)Composite materialAnalytical Chemistry (journal)SputteringMetallurgyNanotechnologyChromatographyThermodynamicsChemistryPhysicsAdvanced Sensor Technologies ResearchScientific Measurement and Uncertainty EvaluationCalibration and Measurement Techniques