Hybrid integrated Si nanosheet GAA-FET and stacked SiGe/Si FinFET using selective channel release strategy
Fei Zhao, Xiaofeng Jia, Huaizhi Luo, Jiayi Zhang, Xiaotong Mao, Yan Li, Yan Li, Jun Luo, Wenwu Wang, Yongliang Li, Yongliang Li
Topics & Concepts
NanosheetMaterials scienceOptoelectronicsNanotechnologyTransistorField-effect transistorDesign for manufacturabilityChannel (broadcasting)Electrical engineeringEngineeringVoltageSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignIntegrated Circuits and Semiconductor Failure Analysis