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A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets

Francisco López de la Rosa, José L. Gómez-Sirvent, Rafael Morales, Roberto Sánchez-Reolid, Antonio Fernández‐Caballero

2022Applied Soft Computing14 citationsDOI

Topics & Concepts

Convolutional neural networkResidualArtificial intelligenceHyperparameterComputer sciencePattern recognition (psychology)Artificial neural networkDeep learningHyperparameter optimizationSegmentationMachine learningAlgorithmSupport vector machineIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisNon-Destructive Testing Techniques
A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets | Litcius