Life cycle assessment of cleanroom for micro-electro-mechanical systems fabrication with insights on sustainability
Srinivasa Rao Vutla, Srinivasa Prakash Regalla, Kannan Ramaswamy
Topics & Concepts
CleanroomSustainabilityEngineeringProcess engineeringWork (physics)Mechanical engineeringNanotechnologyMaterials scienceEcologyBiologyBuilding Energy and Comfort OptimizationGreen IT and SustainabilityEnergy Efficiency and Management