Journal of Microelectromechanical Systems
Unknown authors
Abstract
The JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (JMEMS) is published bimonthly to report on advances in micromechanics and microdynamical systems.A selection of topics suitable for papers in JMEMS would include descriptions of technologies useful for MEMS, modeling and design issues for MEMS, properties of materials that bear on MEMS designs; phenomena pertinent to MEMS designs and performance; MEMS characterization and reliability; mechanical, electrical, chemical, and biological factors associated with MEMS, and interface issues such as tribology in microsystems.Typical MEMS devices have smaller than millimeter dimensions and they are characterized by engineering and control of lengths and movements that most usually range between nanometers and micrometers.Papers that are sometimes described as being concerned with nanotechnology are welcome in JMEMS, a journal in which the term "micro" is interpreted in its classical sense as tiny.