Cathodic arc deposition of nanocrystalline titanium nitride thin film on fluorine doped tin oxide coated glass substrate: Crystal structural, microstructural, mechanical, optical and electrical properties
J. Senthilselvan, Rajeev R. Pillai, Ramasubramanian Kannan, Baburaj Baskar, Krishna Valleti, J. Manonmani
Topics & Concepts
Materials scienceTinTitanium nitrideNanocrystalline materialThin filmTin oxideSubstrate (aquarium)Composite materialMetallurgyNitrideOxideLayer (electronics)NanotechnologyOceanographyGeologyMetal and Thin Film MechanicsZnO doping and propertiesGaN-based semiconductor devices and materials