Fabrication and mechanical properties of tungsten carbide thin films via mist chemical vapor deposition
Takumi Ikenoue, Takuji YOSHIDA, Masao Miyake, Ryuta Kasada, Tetsuji Hirato
Topics & Concepts
Thin filmChemical vapor depositionTungsten carbideMaterials scienceTungstenCarbon filmFabricationCombustion chemical vapor depositionDeposition (geology)CarbideComposite materialMetallurgyChemical engineeringNanotechnologySedimentPathologyMedicineEngineeringBiologyAlternative medicinePaleontologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites