TeO2 doped ZnO nanostructure for the enhanced NO2 gas sensing on MEMS sensor device
Yempati Nagarjuna, Yu‐Jen Hsiao
Topics & Concepts
Scanning electron microscopeMaterials scienceNanostructureDopingHeterojunctionMicroelectromechanical systemsSputteringTransmission electron microscopyNanomaterialsAnalytical Chemistry (journal)SelectivityNanotechnologyOptoelectronicsThin filmChemistryComposite materialEnvironmental chemistryBiochemistryCatalysisGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors