Study of boron doped amorphous silicon lightly hydrogenated prepared by DC magnetron sputtering for infrared detectors applications
Khadidja Ketroussi, Rabah Cherfi, H.Y. Seba, Sonia Tata, L. Chabane, L. Özyüzer, A. M. Rahal
Topics & Concepts
BoronMaterials scienceAmorphous siliconAnalytical Chemistry (journal)SiliconSputter depositionSputteringDopingAmorphous solidBolometerInfraredHydrogenThin filmOptoelectronicsNanotechnologyCrystalline siliconOpticsDetectorCrystallographyChemistryChromatographyOrganic chemistryPhysicsThin-Film Transistor TechnologiesSilicon and Solar Cell TechnologiesSilicon Nanostructures and Photoluminescence