Effect of surface treated amorphous Si–Zn–Sn–O on the electrical properties of thin film transistors by Ar plasma treatment
Ji Won Kim, Sang Yeol Lee
Topics & Concepts
Thin-film transistorMaterials scienceAmorphous solidPlasmaThin filmTransistorOptoelectronicsChemical engineeringAnalytical Chemistry (journal)Composite materialNanotechnologyChemistryElectrical engineeringCrystallographyOrganic chemistryEngineeringPhysicsQuantum mechanicsVoltageLayer (electronics)Thin-Film Transistor TechnologiesElectrical and Thermal Properties of MaterialsTransition Metal Oxide Nanomaterials