ToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H2, C2H2, CO, and O2

Jernej Ekar, P. Panjan, Sandra Drev, Janez Kovač

2021Journal of the American Society for Mass Spectrometry34 citationsDOI Open Access PDF

Abstract

is proposed for the depth profiling of metal/metal oxide multilayers and alloys.

Topics & Concepts

SputteringChemistryAnalytical Chemistry (journal)MetalOxideSecondary ion mass spectrometryAlloyIonMaterials scienceThin filmNanotechnologyOrganic chemistryChromatographyIon-surface interactions and analysisAnalytical chemistry methods developmentElectronic and Structural Properties of Oxides

ToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H<sub>2</sub>, C<sub>2</sub>H<sub>2</sub>, CO, and O<sub>2</sub>

Abstract

Topics & Concepts