Carrier phase distribution based scan step noise correction for white light interferometry topography measurements
Long Ma, Fengyu Yang, Yuan Zhao, Pei Xin, Xutao Yin
Topics & Concepts
Interference (communication)OpticsInterferometryNoise (video)Phase noiseNanometrologyPhase (matter)RepeatabilityMaterials scienceLinearityWhite light interferometryComputer scienceCalibrationRange (aeronautics)MetrologyPhysicsArtificial intelligenceMathematicsTelecommunicationsStatisticsChannel (broadcasting)Image (mathematics)Quantum mechanicsComposite materialOptical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesAdvanced Optical Sensing Technologies