Atomic surface of quartz glass induced by photocatalytic green chemical mechanical polishing using the developed SiO<sub>2</sub>@TiO<sub>2</sub> core–shell slurry
Yuanhang Fan, Zhenyu Zhang, Jiaxin Yu, Xingqiao Deng, Chunjing Shi, Hongxiu Zhou, Fanning Meng, Junyuan Feng
Abstract
The material removal mechanism for polishing quartz glasses using SiO 2 @TiO 2 composite abrasives under photocatalytic conditions.
Topics & Concepts
PolishingSlurryQuartzMaterials sciencePhotocatalysisChemical-mechanical planarizationCore (optical fiber)Shell (structure)Chemical engineeringComposite materialMineralogyChemistryCatalysisBiochemistryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques