On the angular distributions of atoms sputtered by gas cluster ion beam
A. V. Nazarov, Andrey D. Zavilgelskiy, A.E. Ieshkin, Д.С. Киреев, A. A. Shemukhin, V. S. Chernysh, K. Nordlund, Flyura Djurabekova
Topics & Concepts
Cluster (spacecraft)Atomic physicsIonFluenceAtom (system on chip)SputteringBeam (structure)ChemistryMolecular physicsMaterials sciencePhysicsThin filmOpticsNanotechnologyComputer scienceProgramming languageOrganic chemistryEmbedded systemIon-surface interactions and analysisDiamond and Carbon-based Materials ResearchAdvanced Materials Characterization Techniques