Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering
L. Natrayan, S. Balaji, G. Bharathiraja, S. Kaliappan, Dhinakaran Veeman, Wubishet Degife Mammo
Abstract
The mechanical properties of TiAlN deposited on the steel are explained in this study. Thin films are deposited by RF magnetron sputtering on the steel substrates to improve the wear resistance and hardness of the samples. Due to their improved microstructure and nanograins, the nanofilms have improved the mechanical properties of the steel substrate surface. The thin film deposited has improved the wear resistance by 80% and has improved the hardness by 95%. The deposited thin films are tested for hardness by nanoindentation and wear test by the pin-on-disk test. SEM has tested films for their microstructure and adhesion by nanoscratch test.
Topics & Concepts
Materials scienceNanoindentationMicrostructureSputter depositionThin filmSubstrate (aquarium)Composite materialSputteringWear resistanceAdhesionMetallurgyCavity magnetronNanotechnologyGeologyOceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis