Litcius/Paper detail

Investigations into surface topography of glass microfeatures formed by pulsed electrochemical discharge milling for microsystem applications

Aman Verma, Dileep Kumar Mishra, Karan Pawar, Pradeep Dixit

2020Microsystem Technologies27 citationsDOI

Topics & Concepts

MicrochannelMaterials scienceMicrosystemElectrolyteSurface micromachiningComposite materialElectrodeSubstrate (aquarium)Duty cycleSoda-lime glassMicroelectromechanical systemsOptoelectronicsNanotechnologyVoltageChemistryElectrical engineeringFabricationEngineeringMedicinePhysical chemistryPathologyGeologyOceanographyAlternative medicineAdvanced Machining and Optimization TechniquesLaser Material Processing TechniquesAdvanced Surface Polishing Techniques