Machine learning-based modeling and operation of plasma-enhanced atomic layer deposition of hafnium oxide thin films
Yangyao Ding, Yichi Zhang, Ho Yeon Chung, Panagiotis D. Christofides
Topics & Concepts
Atomic layer depositionComputer scienceDeposition (geology)Computational fluid dynamicsMaterials scienceHafniumThin filmNanotechnologyAerospace engineeringSedimentEngineeringZirconiumMetallurgyPaleontologyBiologySemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignFerroelectric and Negative Capacitance Devices