Incremental FIB-DIC Ring-Core Methods for the Residual Stress Measurement of Bilayer Thin Films
Nhat Minh Dang, Wei-Yu Ku, Z.-Y. Wang, Chang‐Yu Lin, Terry Yuan-Feng Chen, Ming-Tzer Lin
Topics & Concepts
Residual stressMaterials scienceThin filmBilayerComposite materialStress (linguistics)Hole drilling methodStress relaxationNanotechnologyMembraneChemistryBiochemistryPhilosophyCreepLinguisticsAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsWelding Techniques and Residual Stresses