Vibration-resistant interference microscope with assistant focusing for on-machine measurement of surface topography
Qian Liu, Hui Zhang, Xiaojin Huang, Kaihua Cui, Lulu Li, Xiaobin Yue
Topics & Concepts
OpticsInterference microscopyMicroscopeMachiningInterference (communication)VibrationInterferometrySurface roughnessRepeatabilityDiamond turningProfilometerSurface finishPhase (matter)AmplitudeAccuracy and precisionAcousticsSurface metrologyMaterials scienceComputer sciencePhysicsMathematicsStatisticsComposite materialQuantum mechanicsComputer networkMetallurgyChannel (broadcasting)Optical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesAdvanced Surface Polishing Techniques