RF magnetron sputtering processed transparent conductive aluminum doped ZnO thin films with excellent optical and electrical properties
Chunhu Zhao, Junfeng Liu, Yixin Guo, Yanlin Pan, Xiaobo Hu, Guoen Weng, Jiahua Tao, Jinchun Jiang, Shaoqiang Chen, Pingxiong Yang, Junhao Chu
Topics & Concepts
Wurtzite crystal structureMaterials scienceThin filmOptoelectronicsSputter depositionBand gapDopingTransmittanceElectrical resistivity and conductivityElectron mobilityTransparent conducting filmSputteringNanotechnologyMetallurgyZincElectrical engineeringEngineeringZnO doping and propertiesChalcogenide Semiconductor Thin FilmsCopper-based nanomaterials and applications