Effect of bias gradient delta on mechanical and tribological properties of DLC films sputtered on ACM
Changxin Han, Yang Tao, Xinkai Lin, Yinqiao Song, Meixia Xie, Qiaoyuan Deng, Feng Wen
Topics & Concepts
Materials scienceTribologyBiasingComposite materialSubstrate (aquarium)Raman spectroscopyMicrostructureSputter depositionDiamond-like carbonX-ray photoelectron spectroscopySputteringSurface roughnessAnalytical Chemistry (journal)Thin filmNanotechnologyVoltageOpticsChemistryNuclear magnetic resonanceElectrical engineeringGeologyPhysicsChromatographyEngineeringOceanographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives