Thermoelastic damping in orthotropic and isotropic NEMS resonators accounting for double nonlocal thermoelastic effects
Hamid Reza Ahmadi, Zaher Rahimi, Wojciech Sumelka
Abstract
Thermoelastic damping is a prominent internal dissipation mechanism in small-scale mechanical resonators. It has been given a lot of attention recently due to the endeavors to design high-quality nanoelectromechanical systems. In the article, this phenomenon is analyzed for in-plane vibration of orthotropic and isotropic nanoplate resonators using coupled nonlocal heat conduction and nonlocal elasticity theories. The obtained thermal-displacement equations are solved using the Galerkin residual technique and the output results are illustrated and compared for isotropic and orthotropic materials, using the classical theory, the nonlocal elasticity theory, the nonlocal heat conduction theory, and coupled nonlocal thermoelasticity. The results show significant impacts of both the nanosystem geometrical and physical parameters on the quality factor.